With huge inventory depots in the US and Korea, as well as having an established worldwide network for spares parts at our disposal, Innosys can deliver spare parts much faster and  at a fraction of the OEM price.  Our inventory consists of surplus, refurbished, and second source parts.  We specialize in amat parts, but also have access to Novellus and Lam spares as well as accessories such as vacuum pumps, generators, heat exchangers etc.  Please contact us with the desired part number! 

As a result of our extensive inventory in the US and Korea, Innosys delivers spare parts much faster and less expensive than the original manufacturer.  Additionally, Innosys has established a worldwide network for seeking difficult to find spares.  Our inventory consists of surplus, refurbished, and second source parts.  We specialize in amat parts, but also have access to Novellus and Lam spares as well as peripherals and accessories such as vacuum pumps, generators, heat exchangers etc.  Please contact us with the desired part number!