Innosys can supply fully refurbished systems and chambers for PVD, CVD and etch applications on Endura, Centura, Producer and P-5000 platforms. Below is a partial list of the processes and chamber configurations supported by Innosys.  
 
      PE Silane Oxide/ Nitride
      SA BPSG/ HTUSG
      SA BPSG/ HTUSG
      SA High Aspec Ratio Gap Fill
      Advanced Patterned Film
 
 
      200~300mm size
      Multi Slots Load Locks
      SMIF Interface
      VHP Robots
      Fast Wafer Mapping
      Buffer Lid Hoist
 
 
      PE CVD Twin
      SA CVD Twin
 
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