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Home > Products > Centuras |
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Innosys
can supply fully refurbished systems and chambers
for PVD, CVD and etch applications on Endura, Centura, Producer and P-5000 platforms.
Below is a partial list of the processes and chamber configurations supported by Innosys. |
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TEOS, Silane Oxide/Nitride |
Tungsten CVD, WSiX |
Sputter Oxide, Poly or Metal Etch |
Strip |
Sputter Oxide, Poly or Metal Etch |
RTP/RTA |
IPS Dielectric Etch |
High Densitiy Plasma Dielectric Etch |
Titanium Tungsten (TiW) |
DPS |
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150mm
- 200mm size |
Wide
or Narrow Body Load Locks |
Standard
or Extended System Controller |
Through-the-Wall,
Ballroom Style or SMIF Interface |
HP,
HP+ or VHP Robots |
Fast
Wafer Mapping |
Buffer
/ Transfer Lid Hoist |
Cool
Down, Pass-Thru Orienters |
208Vac,
50 or 60Hz top feed or bottom |
Single
or Dual Orienter |
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DxZ Chamber |
WxZ, WxL |
MxP, MxP+ |
ASP, PRSP |
eMxP+ |
Radiance |
IPS |
Ultima, Ultima Plus, Ultima X |
TxZ |
DPS, DPS+ |
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2345 Bering
Drive, San Jose, CA, 95131 Tel: 408.324.0385 Fax: 408.324.0390
© 2007 Innosys Technologies Inc. All rights reserved. |
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